A tidbit, a one of more lunatical proposal for the next gen fab design is to build it around a multimegawatt cyclotron, and have the light source problem "solved for good"<p>The genuine problem with tin plasma laser is its power efficiency. An early adopter runs can bare with 0.02% energy efficiency, but imagine, say, a few 20 line fabs and their power consumption.<p>Another very important advantage of this design would be getting a more stable, easily tunable, and more narrowband light source. Tin plasma has around 1nm deviation in its spectrum, while a cyclotron can get to picometres on an arbitrary wavelength.<p>And with all above, you get a supremely tempting option to try diffractive optics, and do away with all geometry imposes nonsense of EUV reflective optics...